Global Foundries. has filed a patent for semiconductor structures with built-in temperature sensors. The structure includes active gate structures and a temperature sensor on the same device level, featuring force and sensing lines. GlobalData’s report on Global Foundries gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Global Foundries, Quantum dot devices was a key innovation area identified from patents. Global Foundries's grant share as of January 2024 was 82%. Grant share is based on the ratio of number of grants to total number of patents.
Semiconductor structure with built-in temperature sensor
The patent application (Publication Number: US20240035898A1) describes a structure with a built-in temperature sensor adjacent to active gate structures. The temperature sensor includes floating gate structures connected to force and sensing lines, allowing for accurate temperature monitoring. The sensor can be parallel to the active gate structures or surround them in various configurations, such as having multiple floating gate structures in a serpentine layout. The sensor's design enables it to be on the same device level as the active gate structures, ensuring efficient temperature monitoring.
Furthermore, the patent application details a method for utilizing the built-in temperature sensor. By providing a voltage at the input line of the sensor, sensing and discharging the voltage, and determining resistance based on the voltage difference, the method can accurately correlate resistance to the temperature generated by the active gate structures. This innovative approach to temperature monitoring within semiconductor structures can lead to more precise control and optimization of device performance, ensuring efficient operation and longevity.
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