Newport has been granted a patent for an isolation valve assembly designed for semiconductor processing systems. The assembly includes a seal plate, coolant channels for cooling, and a closure element with a sealing element to prevent gas flow. The innovative design ensures efficient operation and reliability in gas flow control. GlobalData’s report on Newport gives a 360-degree view of the company including its patenting strategy. Buy the report here.

According to GlobalData’s company profile on Newport, was a key innovation area identified from patents. Newport's grant share as of February 2024 was 67%. Grant share is based on the ratio of number of grants to total number of patents.

Isolation valve assembly for semiconductor processing system

Source: United States Patent and Trademark Office (USPTO). Credit: Newport Corp

The granted patent (Publication Number: US11854839B2) discloses an isolation valve assembly designed for use in semiconductor processing systems. The assembly includes a valve body with an inlet and outlet, a seal plate with a movable first portion allowing gas flow and a second portion to prevent gas flow, and at least one coolant channel for cooling the seal plate. An actuatable closure element presses against the seal plate to retain it in position and releases when the seal plate moves. The closure element includes elastomer sealing elements to prevent gas flow when the seal plate is stationary.

Furthermore, the isolation valve assembly features a linear motion for the seal plate between the first and second positions, with a specific height range in relation to the diameter of the inlet and outlet. It also includes apertures for purge gas and chemical species injection ports. The seal plate can pivot about a point for rotational motion and includes fluid channels for communication. The closure element has a second sealing element to prevent gas flow when the seal plate is stationary. Overall, the design of this isolation valve assembly aims to provide efficient gas flow control and cooling capabilities for semiconductor processing systems.

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GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.

GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.