Camtek has been granted a patent for a method of inspecting the top redistribution layer (RDL) of an object. The method involves illuminating the object with radiation, generating detection signals from reflected radiation, and processing the signals to distinguish between the top RDL and lower RDL layers. The patent aims to provide information about the top RDL for inspection purposes. GlobalData’s report on Camtek gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Camtek, Pose estimation was a key innovation area identified from patents. Camtek's grant share as of June 2023 was 1%. Grant share is based on the ratio of number of grants to total number of patents.
Method for inspecting top redistribution layer of an object
A recently granted patent (Publication Number: US11682584B2) describes a method, computer-readable medium, and system for inspecting a top redistribution layer (RDL) of an object. The method involves illuminating the object with radiation, where the top RDL is positioned above at least one lower RDL and above at least one dielectric layer. The method further includes generating detection signals that represent radiation reflected from the object and processing these signals to provide information about the top RDL. The processing step involves distinguishing detection signals related to the top RDL from those related to the lower RDL.
The distinguishing of detection signals is based on the strength of the signals, with the detection signals related to the top RDL being stronger than those related to the lower RDL. Additionally, the method includes determining the spectral range of the radiation based on the absorption properties of the dielectric layer(s) of the object. This can be done by analyzing the absorption spectrum of the dielectric material or the thickness of the dielectric layer. The determination of the spectral range can also involve testing the object with ultraviolet radiation of different spectral ranges and selecting the most suitable range.
The patent also describes a non-transitory computer-readable medium that stores instructions for performing the method. The medium includes instructions for illuminating the object, generating detection signals, and processing them to provide information about the top RDL. Similarly, the medium includes instructions for distinguishing detection signals related to the top RDL from those related to the lower RDL and determining the spectral range of the radiation based on the absorption properties of the dielectric layer(s).
Furthermore, the patent discloses a system for inspecting an object. The system includes an illumination module for illuminating the object with radiation, a detector for generating detection signals representing the reflected radiation, and a processor for processing the signals to provide information about the top RDL. The processor is designed to distinguish the detection signals related to the top RDL from those related to the lower RDL. The system also takes into account the absorption properties of the dielectric layer(s) to determine the spectral range of the radiation.
Overall, this patent presents a method, computer-readable medium, and system for inspecting the top redistribution layer of an object. By distinguishing detection signals and determining the appropriate spectral range, this technology can provide valuable information about the top RDL, contributing to the inspection and analysis of objects in various industries.
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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
