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Lam Research gets grant for substrate processing system with dual ion filter
Lam Research's patented substrate processing system features a dual ion filter to enhance plasma uniformity. The system includes upper and...
Lam Research in future of work: theme innovation strategy
Lam Research had 15 patents in future of work during Q1 2024. Lam Research Corp has developed systems and methods...
Lam Research in robotics: theme innovation strategy
Lam Research had four patents in robotics during Q1 2024. Lam Research Corp filed a patent for a wafer bow...
Lam Research in 3D printing: theme innovation strategy
Lam Research had two patents in 3D printing during Q1 2024. The patent filed by Lam Research Corp in Q1...
Lam Research in big data: theme innovation strategy
Lam Research had four patents in big data during Q1 2024. Lam Research Corp has developed a virtual fabrication environment...
Lam Research in artificial intelligence: theme innovation strategy
Lam Research had six patents in artificial intelligence during Q1 2024. Lam Research Corp has filed patents for methods and...
Lam Research gets grant for plasma processing device with dielectric window and air amplifier
Lam Research's patented plasma processing device includes a dielectric window, vacuum chamber, energy source, and air amplifier to enclose and...
Lam Research gets grant for method of forming ferroelectric hafnium oxide for feram memory
Lam Research has patented a method for forming ferroelectric hafnium oxide (HfO2) in a substrate processing system. The process involves...
Lam Research in artificial intelligence: theme innovation strategy
Lam Research had five patents in artificial intelligence during Q4 2023. The patent filed by Lam Research Corp in Q4...
Lam Research in future of work: theme innovation strategy
Lam Research had 19 patents in future of work during Q4 2023. The patents filed by Lam Research Corp in...
Lam Research in 3D printing: theme innovation strategy
Lam Research had three patents in 3D printing during Q4 2023. Lam Research Corp has developed a method for 3D...
Lam Research in robotics: theme innovation strategy
Lam Research had five patents in robotics during Q4 2023. Lam Research Corp filed a patent for a method of...
Lam Research gets grant for a heating device with a flexible serpentine shape
Lam Research has been granted a patent for a heating device that is bonded to tubing structures to form a...
Lam Research files patent on an apparatus for clean bevel edge and backside of substrate
Lam Research has filed a patent for an apparatus that performs a dry backside and bevel edge clean of a...