Global Foundries has been granted a patent for a lateral bipolar transistor structure with inner and outer spacers, enhancing performance. The structure includes specific layers and dopant concentrations for improved functionality. GlobalData’s report on Global Foundries gives a 360-degree view of the company including its patenting strategy. Buy the report here.
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According to GlobalData’s company profile on Global Foundries, Quantum dot devices was a key innovation area identified from patents. Global Foundries's grant share as of January 2024 was 82%. Grant share is based on the ratio of number of grants to total number of patents.
Lateral bipolar transistor structure with inner and outer spacers
A lateral bipolar transistor structure has been granted a patent (Publication Number: US11888050B2) with a unique design featuring an emitter/collector (E/C) layer over an insulator, a first base layer with a concave sidewall, and a second base layer with a higher dopant concentration. The structure also includes inner and outer spacers, with the inner spacer having a vertically tapered sidewall and the outer spacer having a non-tapered sidewall. The second base layer is T-shaped, and the E/C layer is divided into lower and upper portions adjacent to the first base layer and outer spacer, respectively.
The patent also covers a method for forming the bipolar transistor structure, involving the sequential formation of the E/C layer, first base layer, second base layer, inner spacer, and outer spacer. The method includes specific steps such as creating a concave sidewall for the first base layer, adjusting dopant concentrations, and forming the spacers with precise dimensions. The inner spacer is designed with a uniform horizontal width and consists of an oxide insulator, while the outer spacer is made of a nitride insulator. This method aims to optimize the performance and efficiency of the lateral bipolar transistor structure by carefully controlling the design and fabrication process to achieve desired electrical characteristics.
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