MegaChips has been granted a patent for a device with a microelectromechanical systems (MEMS) resonator that includes a layer of degenerately doped silicon and a piezoelectric material layer. The device also features a heating element to control the temperature-dependent frequency of the resonator. GlobalData’s report on MegaChips gives a 360-degree view of the company including its patenting strategy. Buy the report here.
Smarter leaders trust GlobalData
According to GlobalData’s company profile on MegaChips, Cloud gaming was a key innovation area identified from patents. MegaChips's grant share as of February 2024 was 78%. Grant share is based on the ratio of number of grants to total number of patents.
Mems device with heating element for resonator
A recently granted patent (Publication Number: US11916534B2) discloses a device comprising a microelectromechanical systems (MEMS) resonator with a layer of degenerately doped silicon and a piezoelectric material layer that vibrates at a frequency during operation. The device includes a heating element to heat the MEMS resonator, with additional features such as a temperature sensor to adjust the temperature affecting the resonator and temperature control circuitry to maintain the resonator at a target setpoint temperature. Furthermore, the MEMS resonator includes a frequency modifying element that can be dynamically controlled during operation to urge the frequency of vibration toward a target frequency.
Moreover, the device is structured with multiple layers of degenerately doped silicon and a piezoelectric material layer to achieve specific temperature coefficient of frequency (TCF) characteristics. The device can be used in various applications, including as an oven-controlled oscillator (OCXO) integrated circuit or an oscillator integrated circuit with external electrical contacts for outputting clock signals and receiving control signals. Additionally, the device features programmable storage for control parameters of the heating element and a frequency trim material that can be structurally modified by a laser to adjust the frequency of vibration towards a target resonant frequency. These innovative features make the device versatile and adaptable for a wide range of temperature-dependent applications.
To know more about GlobalData’s detailed insights on MegaChips, buy the report here.
Premium Insights
From
The gold standard of business intelligence.
Blending expert knowledge with cutting-edge technology, GlobalData’s unrivalled proprietary data will enable you to decode what’s happening in your market. You can make better informed decisions and gain a future-proof advantage over your competitors.
GlobalData, the leading provider of industry intelligence, provided the underlying data, research, and analysis used to produce this article.
GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies across the world’s largest industries.
